The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Jan. 04, 2001
Applicant:
Inventor:
Klaus Rinn, Heuchelheim, DE;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/722 ; G01B 1/130 ;
U.S. Cl.
CPC ...
H01J 3/722 ; G01B 1/130 ;
Abstract
A measuring instrument ( ) and a method for measuring features ( ) on a substrate ( ) are described. The measuring instrument ( ) has a support element ( ) that is provided opposite the substrate ( ). Mounted on the support element ( ) is a nonoptical measurement device ( ) with which a measurement of the features ( ) of the substrate ( ) is performed under ambient air pressure. The nonoptical measurement device ( ) can be configured, for example, as an AFM ( ) or an electron beam lens ( ). Furthermore, in addition to the nonoptical measurement device ( ), an optical lens ( ) can be provided that is used for rapid location and determination of the coarse position of features ( ) on the substrate ( ).