The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2003

Filed:

Apr. 01, 1999
Applicant:
Inventors:

Michael Kelly, Freising, DE;

Oliver Ambacher, Neufahrn, DE;

Martin Stutzmann, Erding, DE;

Martin Brandt, München, DE;

Roman Dimitrov, München, DE;

Robert Handschuh, Garching/Alz, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/126 ; H01L 2/1324 ; H01L 2/142 ; H01L 2/1477 ;
U.S. Cl.
CPC ...
H01L 2/126 ; H01L 2/1324 ; H01L 2/142 ; H01L 2/1477 ;
Abstract

A method of separating two layers of material from one another in such a way that the two separated layers of material are essentially fully preserved. An interface between the two layers of material at which the layers of material are to be separated, or a region in the vicinity of the interface, is exposed to electromagnetic radiation through one of the two layers of material. The electromagnetic radiation is absorbed at the interface or in the region in the vicinity of the interface and the absorbed radiation energy induces a decomposition of material at the interface.


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