The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Sep. 25, 2000
Applicant:
Inventors:
Darryl W. Peters, Stewartsville, NJ (US);
Floyd L. Riddle, Hellertown, PA (US);
Assignee:
Ashland Inc., Dublin, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 ; C11D 9/00 ; C11D 3/00 ; C23G 1/02 ;
U.S. Cl.
CPC ...
G03F 7/42 ; C11D 9/00 ; C11D 3/00 ; C23G 1/02 ;
Abstract
A stripping and cleaning composition for the removal of residue from metal and dielectric surfaces in the manufacture of semi-conductors and microcircuits. The composition is an aqueous system including organic polar solvents including corrosive inhibitor component from a select group of aromatic carboxylic acids used in effective inhibiting amounts. A method in accordance with this invention for the removal of residues from metal and dielectric surfaces comprises the steps of contacting the metal or dielectric surface with the above inhibited compositions for a time sufficient to remove the residues.