The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Jul. 16, 2001
Applicant:
Inventors:
Daniel J. Gramarossa, Moorpark, CA (US);
Gary C. Downes, Moorpark, CA (US);
Assignee:
Technic Inc., Cranston, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/18 ; B05D 1/02 ;
U.S. Cl.
CPC ...
B05D 1/18 ; B05D 1/02 ;
Abstract
A method of processing a wafer or other articles by horizontally transporting vertically oriented wafers into one or more process cells. A carrier is rotated from a substantially horizontal orientation to a substantially vertical orientation. A cathode assembly secures the wafer onto the carrier and electrically couples the wafer to a power supply.