The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Dec. 06, 2000
Sevig Ayter, Cupertino, CA (US);
John W. Sliwa, Jr., Los Altos, CA (US);
Acuson Corporation, Mountain View, CA (US);
Abstract
A capacitive microelectromechanical ultrasound transducer array with improved efficiency and durability is provided. Efficiency is provided by stacking CMUTs in the range dimension (i.e. away from the face of the transducer). A plurality of chambers and associated membranes are stacked along a range dimension or parallel to the direction of acoustic radiation. Because the CMUT transducer element is stacked, ultrasound is transmitted through the plurality of chambers, amplifying the response of the transducer element. Durability is increased within the transducer by filling the chamber with a nongaseous filler. A liquid, polymer, solid or plasma fills the chamber or chambers. The nongaseous filler allows movement of the membrane for transducing between acoustic and electrical energies, but prevents collapse or bottoming out of the membrane.