The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Oct. 12, 2001
Applicant:
Inventor:
Shinji Yamaguchi, Ama-gun, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D 5/00 ;
U.S. Cl.
CPC ...
F27D 5/00 ;
Abstract
A ceramic heater ( ) includes a ceramic substrate ( ) having a heating surface ( ) for supporting and heating an object to be processed, a hearing element ( ) provided in the substrate ( ), and embossed portions ( ) on the heating surface ( ) which contact the object. The number of the embossed portions ( ) per unit area on the heat spot ( ) is less than that on the rest of the heating surface ( ). When the average temperature of the heating surface ( ) is raised to reach a target temperature, the heat spot ( ) having relatively high surface temperatures exists on the heating surface ( ).