The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2003

Filed:

Oct. 05, 2001
Applicant:
Inventors:

Kohei Sakurai, Hitachi, JP;

Masahiro Komachiya, Hitachinaka, JP;

Masahiro Matsumoto, Hitachi, JP;

Seikou Suzuki, Hitachiota, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 1/900 ;
U.S. Cl.
CPC ...
G01C 1/900 ;
Abstract

A sensor device has a sensing layer and an auxiliary layer for supporting the sensing layer, the two layers being superposed on each other in a laminar form. The sensing layer has a vibratory body displaceable in a direction parallel to a junction surface between the two layers. The auxiliary layer is affixed to the sensing layer and a recess or through-hole of a larger area than that of the vibratory body is formed in the auxiliary layer at a part thereof confronting the vibratory body.


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