The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2003
Filed:
Apr. 19, 2000
Applicant:
Inventors:
Robert John Clifford Mitchell, Pulborough, GB;
Keith Relleen, Horsham, GB;
Justin Lowe, San Francisco, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/700 ;
U.S. Cl.
CPC ...
H01J 3/700 ;
Abstract
An ion implanter having a scanning arm which can pass vertically through ion beam, having a wafer loading/unloading position above the beam. The scanning arm also has capability for movement of wafer in its own plane when tilted relative to the beam, and there is also disclosure of a double scanning arm arrangement generating to/from a single wafer loader/unloader.