The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2003
Filed:
Sep. 16, 1999
Applicant:
Inventors:
Hans-Peter Feuerbaum, Munich, DE;
Dieter Winkler, Munich, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/7145 ;
U.S. Cl.
CPC ...
H01J 3/7145 ;
Abstract
The invention provides an objective lens for focusing a charged particle beam on a specimen. The objective lens comprises a first focusing lens positioned between a charged particle source and the specimen for finely focusing the beam of charged particles on the specimen. The objective lens further comprises a second focusing electrostatic lens positioned between the first focusing lens and the specimen for coarsely focusing the beam of charged particles on the specimen.