The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2003
Filed:
Jun. 05, 2000
Frank Sigming Geefay, Cupertino, CA (US);
Agilent Technologies, Inc., Palo Alto, CA (US);
Abstract
A method of fabricating a diode device, such as a PIN diode, includes forming top and bottom regions of opposite conductivity types and includes anisotropically etching into the top surface to form a pit having side walls that converge with approach to the bottom surface. However, the pit does not extend to the bottom surface. In the PIN diode embodiment, the pit terminates within an intrinsic region that separates a bottom surface diffusion region from a diffusion region along the walls of the anisotropically etched pit. The anisotropic etching approach provides a degree of self regulation with regard to the geometries of the pit. A process flow of steps is described, which allows thicker and larger diameter wafers to be used in the formation of an array of such diode device.