The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
May. 03, 2000
Bruce A. Horwitz, Newton Centre, MA (US);
Catherine E. DeVoe, Newton, MA (US);
Microe Systems, Inc., Natick, MA (US);
Abstract
A position sensor having a wavefront compensator, a detector array and a grating in a diffractive configuration, and which incorporates a second wavefront compensator and a second detector array in parallel with the first wavefront compensator and detector array, to provide a second optical channel for measurement of an additional degree of freedom (roll), the effects of which can then be removed from or utilized in the main measurement channel; and in which the relative effects of grating roll and grating displacement are different in this second channel when compared to the first sensing channel; and in one embodiment of which this differentiation is created by having different ratios of the grating period to the detector fringe period in the two channels.