The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
Feb. 22, 2000
Applicant:
Inventors:
Andrew A. Berlin, San Jose, CA (US);
Elmer S. Hung, Foster City, CA (US);
Assignee:
Xerox Corporation, Stamford, CT (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 4/014 ;
U.S. Cl.
CPC ...
H01J 4/014 ;
Abstract
A microsensor including a VCSEL for use in a MEMS. By coupling the top mirror of the VCSEL to the micromechanical structure, either directly or indirectly, the motion of the micromechanical structure in response to a physical phenomenon can directly modulate the wavelength of the light emitted from the VCSEL. Also, a method for sensing and transmitting information about the configuration or motion of a mechanical structure. The method includes coupling the top mirror of a VCSEL to the mechanical structure that directly encodes information about the motion into the frequency of light emitted by the VCSEL.