The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
Nov. 30, 1999
Hong Qiu, Nagano, JP;
Soichi Moriya, Nagano, JP;
Hiroyuki Kamei, Nagano, JP;
Koji Sumi, Nagano, JP;
Masami Murai, Nagano, JP;
Tsutomu Nishiwaki, Nagano, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by A B O , and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.