The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2003
Filed:
Aug. 10, 2000
Marc Spinali, Danville, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels. Each of the lens barrels has an optical axis. The optical axes run parallel to each other. The lens barrel structure also includes a third lens barrel transversely connecting the first lens barrel to the second lens barrel. A reticle is placed in front of an entrance end of the first lens barrels and a wafer is placed in front of an exit end of the second lens barrel. Each lens barrel has a center plane perpendicular to the corresponding optical axis at a position half-way along the length of the corresponding lens barrel. A lens barrel support structure firmly secures the plurality of lens barrels. The lens barrel support structure is made of a material having a low coefficient of thermal expansion. The support structure includes first and second support platforms to support the first and second lens barrels, respectively, near the corresponding center planes to minimize errors due to temperature changes, vibrational motion, or other external forces.