The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2003
Filed:
Jun. 11, 2001
Applicant:
Inventor:
Young-Chang Kim, Seoul, KR;
Assignee:
Samsung Electric Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/1308 ; G01R 3/100 ;
U.S. Cl.
CPC ...
G01R 3/1308 ; G01R 3/100 ;
Abstract
An apparatus for measuring the focus of a light exposure system for selectively exposing a photosensitive plate to light rays in a process of fabricating a semiconductor device, wherein there is provided a focus measuring part having opaque region, transparent region, and a transparent electrode arranged in the transparent region, a conducting stage supporting the photosensitive plate; and a capacitance detector for measuring the capacitance between the transparent electrode and the conducting stage.