The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2003
Filed:
Jan. 28, 2000
Applicant:
Inventor:
Jun Nishihara, Kagoshima, JP;
Assignee:
Sony Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/00 ; A47L 2/500 ;
U.S. Cl.
CPC ...
B08B 3/00 ; A47L 2/500 ;
Abstract
A wafer cleaning device is provided with a roll brush extending in an axial direction and having an end portion supported so that the roll brush can be rolled around its axis freely for performing cleaning by touching a rolled contact surface of the roll brush to a cleaned surface of a wafer. The end portion of the roll brush is supported so that the roll brush can be displaced by a dial adjusting screw to enable the axis to be tilted to the cleaned surface of the wafer.