The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2003
Filed:
Mar. 08, 2001
Applicant:
Inventors:
Gary S. Selwyn, Los Alamos, NM (US);
Ivars Henins, Los Alamos, NM (US);
Assignee:
The Regents of the University of California, Los Alamos, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/06 ;
U.S. Cl.
CPC ...
B08B 7/06 ;
Abstract
Apparatus and method for cleaning substrates. A substrate is held and rotated by a chuck and an atmospheric pressure plasma jet places a plasma onto predetermined areas of the substrate. Subsequently liquid rinse is sprayed onto the predetermined areas. In one embodiment, a nozzle sprays a gas onto the predetermined areas to assist in drying the predetermined areas when needed.