The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2003
Filed:
Sep. 08, 2000
Applicant:
Inventors:
Benedetto Vigna, Pietrapertosa, IT;
Alberto Gola, Montu′ Beccaria, IT;
Sarah Zerbini, Fontanellato, IT;
Dario Cini, late of Cornaredo, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/500 ;
U.S. Cl.
CPC ...
G01P 1/500 ;
Abstract
An inertial sensor having a stator and a rotor made of semiconductor material and electrostatically coupled together, and a microactuator also made of semiconductor material, coupled to the rotor and controlled so as to move the rotor itself and thus compensate for the position offset thereof.