The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Mar. 30, 2001
Hiroshi Yamazaki, Tokyo, JP;
Nagase Sangyo Kabushiki Kaisha, Osaki, JP;
Abstract
A low-temperature test equipment capable of monitoring a test under vacuum and low temperature or ultra-low temperature conditions. The test equipment includes plural CCD cameras so arranged that plane positions thereof are rendered different from each other, as well as a prism mechanism constructed and arranged so as to permit any of the cameras to photograph a surface of a semiconductor wafer and/or a range of at least a part of probe needles of a prober. This permits a test for the wafer by the prober under vacuum and low temperature or ultra-low temperature conditions to be monitored. Also, it facilitates positional registration between the probe needles and the wafer and ensures an increase in accuracy of the test. In addition, when the low-temperature test equipment is configured so as to carry out the test in a continuous manner, full automation of the test may be realized.