The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2003

Filed:

May. 23, 2001
Applicant:
Inventor:

Sachihito Nakafuku, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract

A method for adjusting the frequency of a piezoelectric resonator allows for frequency adjustments to be individually made for each of a plurality of elements disposed on a piezoelectric substrate before the resonator is completed. Moreover, the frequency adjustments can be made with high accuracy in a relatively short time. When adjusting the frequency of each element, an ion beam is irradiated onto a plurality of electrodes disposed on the piezoelectric substrate to etch the electrodes. The method includes the steps of determining a correlation between an ion-beam irradiation time and the amount of frequency changes, measuring the frequency of each element on the piezoelectric substrate, determining the amount of the frequency adjustment of the element based on a difference between the measured frequency and a target value, determining the ion-beam irradiation time for the element based on the determined amount of the frequency adjustment by using the correlation, and irradiating an ion beam onto the element during the determined irradiation time.


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