The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2003

Filed:

Nov. 16, 2000
Applicant:
Inventors:

Masahiro Katashiro, Okaya, JP;

Kazuya Matsumoto, Kamiina-gun, JP;

Shuichi Takayama, Hachioji, JP;

Katsuya Ono, Hino, JP;

Takeshi Suga, Sagamihara, JP;

Hiroyuki Sangu, Akishima, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/10 ;
U.S. Cl.
CPC ...
G01B 9/10 ;
Abstract

A light scanning optical device comprises a light source for entirely illuminating a subject, a converging optical system for converging light returning from a specific minute region of the subject, a light detector for detecting the light converged by the converging optical system, and a scanning mirror for scanning the minute region, the scanning mirror being produced by a semiconductor manufacturing process.


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