The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2003

Filed:

Mar. 30, 2001
Applicant:
Inventors:

Hui Tian, Stanford, CA (US);

William R. Bidermann, Los Gatos, CA (US);

David X. D. Yang, Mountain View, CA (US);

Yi-Hen Wei, San Jose, CA (US);

Assignee:

Pixim, Inc., Mountain View, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/700 ; H01L 3/100 ; H01L 3/1062 ; H01L 2/9267 ; H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/700 ; H01L 3/100 ; H01L 3/1062 ; H01L 2/9267 ; H01L 2/100 ;
Abstract

Photo-sensors, such as photo-diodes, are formed using regions with cross-sections that increase the overall quantum efficiency of the resulting photo-sensor. The cross-sections have additional (e.g., interior) side-wall interfaces, and, in some embodiments, an additional, relatively shallow bottom interface. The increased total side-wall area and any additional shallow bottom area increase the total photo-junction volume located near the surface of the device. As a result, a greater fraction of photons having relatively small absorption lengths (e.g., blue light) will be absorbed within a photo-junction, thereby increasing the quantum efficiency for those photons. The present invention enables photo-sensors to be implemented with more uniform spectral response.


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