The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2003

Filed:

Nov. 07, 2000
Applicant:
Inventors:

Paul Alan Basore, Caringbah, AU;

Neil Barrett, Castle Hill, AU;

Trevor Young, Canley Vale, AU;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1301 ; H01L 2/146 ;
U.S. Cl.
CPC ...
H01L 2/1301 ; H01L 2/146 ;
Abstract

A simple thin film structure is illustrated in which a substrate ( ), which may be glass or any other suitable substrate material, supports a device structure ( ), over which is formed an inert dielectric layer ( ) and a metal film ( ). A pulsed laser beam ( ) directed at the surface of the metal film layer ( ). When the laser is pulsed on, a small amount of metal is ablated directly under the beam and surface tension in the surface of molten metal surrounding the ablated region pulls the metal back from the hole causing a slight thickening of the metal ( ) around the hole, and creates a hole ( ) which is significantly larger in diameter than the ablated region.


Find Patent Forward Citations

Loading…