The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Aug. 31, 2000
Daniel J. Koch, Lakeville, MN (US);
Paul L. Bergstrom, Chandler, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A capacitively sensed micromachined component includes an electrically insulative substrate ( ) having a first side ( ) and a second side ( ) opposite the first side. The component also includes a first layer ( ) adjacent to the second side of the electrically insulative substrate where at least a first portion of the first layer located adjacent to the second side of the electrically insulative substrate is infra-red light absorbing and is also electrically conductive. The component further includes a diffusion and chemical barrier layer ( ) encapsulating the first layer and the electrically insulative substrate. The component still further includes a capacitively sensed micromachined device ( ) on the diffusion and chemical barrier layer.