The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Aug. 30, 2001
Applicant:
Inventors:
Bradford G. Ackerman, Scurry, TX (US);
Bradley F. Bowden, Alfred, NY (US);
Claude L. Davis, Jr., Painted Post, NY (US);
Kenneth E. Hrdina, Horseheads, NY (US);
Assignee:
Corning Incorporated, Corning, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/742 ; G03B 2/762 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/742 ; G03B 2/762 ;
Abstract
A lithographic stage includes a platen having a top face and a bottom face and a holder for holding an optical component on the top face of the platen. The platen is made of a light-weight material such as high purity fused silica or ultra low expansion glass. The bottom face of the platen may further include means for connecting to a positioning device in an extreme ultraviolet lithography system.