The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Aug. 30, 1999
Applicant:
Inventors:
Tetsuro Sato, Tokyo, JP;
Jian-Guo Wen, Tokyo, JP;
Naoki Koshizuka, Tokyo, JP;
Shoji Tanaka, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 3/922 ;
U.S. Cl.
CPC ...
H01L 3/922 ;
Abstract
In a method of manufacturing a Josephson junction, a first superconductive layer is formed on a substrate. An insulating film is formed on the first superconductive layer. The insulating film is etched to have an inclination portion. The first superconductive layer is etched using the etched insulating film as a mask, to have an inclination portion. A barrier layer is formed on a surface of the inclination portion of the first superconductive layer. A second superconductive layer is formed on the barrier layer and the inclination portion of the insulating layer.