The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Aug. 22, 2000
Hitoshi Ohmori, Wako, JP;
Riken, , JP;
Abstract
The polishing pad conditioner incorporates a plurality of diamond prisms arranged regularly and protruding towards a surface to be processed, and a conducting bonding member that fixes the diamond prisms into a single body. The conducting bonding member is provided with a conducting metal plate with a plurality of holes for embedding the diamond prisms and a conducting sintered metal that is filled into the spaces between the holes and the diamond prisms and sintered. The conducting bonding member can be dressed electrolytically by passing a flow of conducting liquid through the gap between the member and an electrode placed opposite. Thus, the surface of a polishing pad can be reprocessed (reconditioned) to an appropriate roughness, so the conditioner can continue to operate under even, stable conditions for a very long time, with a rather low manufacturing cost and without contaminating the silicon wafers.