The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Apr. 17, 2001
Jakob Blattner, Ermatingen, CH;
Reto Stibi, Altnau, CH;
Tec-Sem AG, Tägerwilen, CH;
Abstract
An apparatus and a method for handling individual wafers ( ) that are temporarily in an essentially horizontal position. The apparatus ( ) comprises at least one supporting part ( ) with supporting areas ( ), comprising at least three supporting points ( ), for supporting an edge region of the wafer, and at least one holding part ( ) with holding areas ( ), comprising at least two holding points ( ), for gripping the edge ( ) of this wafer ( ), with the holding points ( ) being moveable relative to the supporting points ( ) and, to grasp the wafer ( ), relative to one another. Moreover, at least one of these holding points ( ) is arranged on a rotatable rod ( ) designed, for reliable holding of the wafer, as a holding part ( ), with rod ( ) extending coaxially with an axis ( ) running through the wafer center ( ) and essentially parallel to the surface of the wafer ( ).