The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Mar. 29, 2001
Applicant:
Inventor:
Kouji Tometsuka, Tokyo, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A substrate processing apparatus that includes a preliminary chamber and a substrate transferring apparatus. The substrate transferring apparatus is disposed in the preliminary chamber for transferring substrate or substrates in and out of a cassette which accommodates the substrate or substrates. The cassette is allowed to be inserted into the preliminary chamber through a lower wall of the preliminary chamber from below.
Tometsuka, Kouji. (2003). Substrate processing apparatus (U.S. Patent No. 6540465). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6540465
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile