The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Feb. 04, 2000
Noriyuki Ohroku, Yokohama, JP;
Yuichirou Tanaka, Fujisawa, JP;
Yoichi Takahara, Yokohama, JP;
Tomonori Saeki, Yokohama, JP;
Susumu Aiuchi, Yokohama, JP;
Hitoshi Oka, Yokohama, JP;
Fumio Morita, Tokyo, JP;
Masataka Fujiki, Toyoma-ken, JP;
Akinobu Yamaoka, Toyama-ken, JP;
Other;
Abstract
At a time of cleaning a plate-like part such as a wafer or the like while rotating, for the purpose of reducing a contamination, a damage and an unevenness of process of the plate-like part which are caused by an amount of charged electricity of the plate-like part, chuck pins (chuck members) which chuck the plate-like part such as the wafer or the like and upper and lower cleaning plates and which oppose to the plate-like part are constituted by a resin material containing carbon powders, and a desired potential difference is applied to a portion between the plate-like part and the cleaning plates by a voltage control unit which is provided in an outer portion.