The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Dec. 04, 2001
Dryver R. Huston, Burlington, VT (US);
Wolfgang Sauter, Burlington, VT (US);
Peter A. Sonntag, Starnberg, DE;
University of Vermont and State Agricultural College, Burlington, VT (US);
Abstract
A bulge tester ( ) for determining residual stresses, and mechanical, thermal and other properties of a thin film ( ) of material. The bulge tester includes a chuck ( ) that supports the substrate ( ) on which the film is deposited by stiction rather than through the use of mounting waxes, adhesives and mechanical clamping. The stiction inducing media ( ) may be viscous grease, a flexible sheet of material such as a rubber, an elastomer, both or other materials. Bulge testing performed using the stiction-based chuck involves inducing stiction between the base ( ) of the chuck and substrate of at least at least 1 kPascal (0.69 lb/in ), as determined using a corner peel test. The pressurized fluid is delivered to the film to be tested, and materials properties of the film are determined as a function of pressure of the fluid and deflection of the film.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile