The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 25, 2003

Filed:

Aug. 14, 2001
Applicant:
Inventors:

Johannes Rau, Gerstetten, DE;

Wolfgang Hummel, Schwaebisch Gmuend, DE;

Juergen Fischer, Heidenheim, DE;

Assignee:

Carl-Zeiss-Stiftung, Heidenheim, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 ;
U.S. Cl.
CPC ...
G02B 7/02 ;
Abstract

An adjusting optical element mount ( ) serves for the position of two components ( ) in relation to one another, in particular of two carrier elements for optical elements, such as mirrors or lenses, in particular as an axial and/or angle manipulator for lithography lenses. The components ( ) can be adjusted in relation to one another via the action of force (F, T). Each of the components ( ) has at least three hinges ( ). Each of the hinges ( ) of one component ( ) is connected in each case to a corresponding hinge ( ) of the respectively other component ( ) to form a pair of hinges ( ) via a lever element ( , 6 ) in each case. Each of the pairs of hinges ( ) is connected in each case to at least one lever ( ) of at least one of the adjacent pairs of hinges ( ) via the at least one lever ( )and at least one further hinge ( ′) in each case.


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