The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Jun. 03, 1999
Applicant:
Inventor:
Jeong Hwan Son, Daejon, KR;
Assignee:
Hynix Semiconductor, Inc., Kyoungki-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; H01L 2/189 ;
U.S. Cl.
CPC ...
H01L 2/100 ; H01L 2/189 ;
Abstract
A method and apparatus for heat-treating a semiconductor substrate to heat different areas of the substrate at different temperatures. The method includes using an apparatus having a chamber of a refractory material; a support plate located at a lower side in the chamber for supporting the semiconductor substrate; a heating device disposed at an upper side in the chamber; and, a heat resistance mask provided between the support plate and fabricated to have different heat transmission rates therein.