The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Jun. 14, 1999
Applicant:
Inventors:
Don Mark Lipkin, Niskayuna, NY (US);
Paul Leonard Dupree, Scotia, NY (US);
Scott Andrew Weaver, Ballston Lk., NY (US);
Assignee:
General Electric Company, Niskayuna, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 3/100 ;
U.S. Cl.
CPC ...
G01N 3/100 ;
Abstract
An article of manufacture forms a tool for determining cleaning parameters of an oxide removal process. The article comprises a block of material upon which an oxide can be formed and a simulated defect structure disposed in the block of material. The article is capable of determining oxide removal parameters of an oxide removal process by disposing an oxidized standard in a reactor, conducting an oxide removal process to remove oxide from the standard, and evaluating the standard and simulated defect structure for remaining oxide and other oxide removal parameters.