The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Apr. 04, 2001
Mary Dykstra Havlicek, Richardson, TX (US);
Joe G. Hoffman, Dallas, TX (US);
Wallace Yuan, Irvine, CA (US);
Air Liquide America Corporation, Houston, TX (US);
Abstract
A method of integrated resin preconditioning and hydrogen peroxide purification is provided. The method includes preconditioning a resin by washing the resin with deionized water to produce a washed resin, and contacting an effective amount of a preconditioning hydrogen peroxide solution with the washed resin to remove impurities from the washed resin, thereby producing a preconditioned resin. The method further includes passing a hydrogen peroxide solution to be purified through a bed of the preconditioned resin to form a hydrogen peroxide solution having a TOC content lower than a TOC content of the hydrogen peroxide solution to be purified, and passing the hydrogen peroxide solution having a TOC content lower than the TOC content of the hydrogen peroxide solution to be purified through one or more ion-exchange resin beds or directing the hydrogen peroxide solution having a TOC content lower than the TOC content of the hydrogen peroxide solution to be purified to a point of use in a semiconductor manufacturing facility the. The preconditioning hydrogen peroxide solution does not pass through the ion exchange resin beds and is not directed to the point of use.