The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Jun. 17, 2002
Applicant:
Inventors:
Ralf Schnupp, Herzogenaurach, DE;
Jochen Thomas, Nuernberg, DE;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 4/304 ;
U.S. Cl.
CPC ...
F04B 4/304 ;
Abstract
An actuator component for a piezoelectrically-driven microatomizer comprises a diaphragm formed in a semiconductor substrate, a piezoelectric actuator which is arranged on a surface of the diaphragm and by means of which the diaphragm can be caused to vibrate, and a passage formed in the semiconductor substrate and used for supplying a liquid to be atomized from an inlet end to the diaphragm surface located opposite the piezoelectric actuator.