The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Jun. 14, 2002
Wolfgang Scholz, Minden, DE;
Albrecht Vogel, Stutensee, DE;
Peter Krippner, Karlsruhe, DE;
Dieter Binz, Hirschberg, DE;
ABB Patent GmbH, Mannheim, DE;
Abstract
There is described a differential pressure sensor made using glass-silicon technology with a diaphragm plate arranged between two carrier plates. To achieve a high resolution at the beginning of the measuring range in conjunction with high overload resistance, the measuring diaphragm plate of the sensor has for a prescribed measuring range within the same measuring chambers a plurality of mutually independent deflectable regions as measuring diaphragms. Each such region acts as a part-sensor with a part-measuring range. The part-measuring ranges of the part-sensors overlap and in total are equal to the prescribed measuring range of the differential pressure sensor. The displacement of the measuring diaphragm of each part-sensor is mechanically limited outside its part-measuring range by the carrier plates.