The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
May. 03, 2000
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A sensor, composed of a multilayer substrate, having a first semiconductor layer in which at least one spring element is configured using patterning, the spring element having two arms running essentially parallel to each other and joining to each other at one end segment, the first arm being mounted on a support block and the second arm being joined to a mass that is movable with respect to the support block, in order to avoid a fracture of the spring elements in response to powerful deflections perpendicular to the semiconductor layer. The at least one spring element is configured so that the end segments of the arms in the longitudinal direction of the arms in the plane of the semiconductor layer are directed so as to be initially bent away from each other and then so as to be bent towards each other, joining each other in a central bent area.