The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 25, 2003

Filed:

Jan. 09, 2001
Applicant:
Inventors:

Munemitsu Abe, Miyagi-ken, JP;

Eiji Shinohara, Miyagi-ken, JP;

Masayoshi Esashi, Miyagi-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 9/00 ;
U.S. Cl.
CPC ...
G01P 9/00 ;
Abstract

The invention provides a capacitive micro sensor that suppresses electric noise generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork having three legs, driving electrodes and detecting electrodes provided on two glass substrates, driving field-throughs that supply the driving electrodes with a drive signal, and detecting fields-through that extract a detecting signal from the detecting electrodes. And, a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent field-throughs of the areas where the driving field-throughs and the detecting field-throughs are arrayed.


Find Patent Forward Citations

Loading…