The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Nov. 04, 1999
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/09 ;
U.S. Cl.
CPC ...
H01S 3/09 ;
Abstract
An excimer laser device which neither corrodes due to a laser gas nor contaminates the laser gas is provided. For this purpose, in an excimer laser device including a cross flow fan ( ) disposed in a chamber ( ) for circulating a laser gas, magnetic bearings ( ) having outer ring magnet coils ( ) and inner ring magnetic substances ( ) for rotatably supporting a rotating shaft ( ) by magnetic force, and a motor ( ) having a stator ( ) and a rotor ( ) for directly and rotationally driving the cross flow fan ( ), the outer ring magnet coils ( ), the inner ring magnetic substances ( ), the rotor ( ), and the stator ( ) are respectively housed in shielded spaces shielded from the laser gas.