The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Mar. 21, 2000
Applicant:
Inventors:
Steven E. Green, Lincoln, NE (US);
Gerald Cooney, Lincoln, NE (US);
Assignee:
J.A. Woollam Co. Inc., Lincoln, NE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 ;
U.S. Cl.
CPC ...
G01J 4/00 ;
Abstract
Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. Also disclosed are methods of use wherein-different detectors in a positionable multiple detector containing system are utilized during different electromagnetic beam detection steps.