The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Jan. 31, 2002
Applicant:
Inventors:
Edward J. Swenson, Portland, OR (US);
Yunlong Sun, Beaverton, OR (US);
Richard S. Harris, Portland, OR (US);
Assignee:
Electro Scientific Industries, Inc., Portland, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 2/600 ; B23K 2/614 ; B23K 2/616 ; B23K 2/618 ;
U.S. Cl.
CPC ...
B23K 2/600 ; B23K 2/614 ; B23K 2/616 ; B23K 2/618 ;
Abstract
A uniform laser spot, such as from an imaged shaped Gaussian output ( ) or a clipped Gaussian spot, that is less than 20 &mgr;m in diameter can be employed for both thin and thick film resistor trimming to substantially reduce microcracking. These spots can be generated in an ablative, nonthermal, UV laser wavelength to reduce the HAZ and/or shift in TCR.