The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Aug. 09, 2000
Applicant:
Inventors:
Takashi Yata, Saitama, JP;
Shigeki Terayama, Kyoto, JP;
Yutaka Koinuma, Ibaraki, JP;
Takeru Ohgushi, Chiba, JP;
Assignee:
Kishimoto Sangyo Co., Ltd., Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/32 ;
U.S. Cl.
CPC ...
G03F 7/32 ;
Abstract
The invention provides a nontoxic, undangerous resist residue remover that enables removal of resist residues to be carried out without metal corrosion or other problems and with safety. The remover is an aqueous solution containing ammonium phosphate and/or condensed ammonium phosphate and having a pH ranging from 1 to 10.