The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Jun. 12, 2000
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/128 ; H01L 2/184 ; G02F 1/1343 ; G02F 1/136 ;
U.S. Cl.
CPC ...
H01L 2/128 ; H01L 2/184 ; G02F 1/1343 ; G02F 1/136 ;
Abstract
A terminal interconnection including an aluminum alloy film and a nitrogen-containing aluminum film layered together is formed on a glass substrate . Nitrogen-containing aluminum film in a contact portion within a contact hole exposing the surface of terminal interconnection has a predetermined thickness d determined based on a specific resistance of the nitrogen-containing aluminum film. The thickness of the nitrogen-containing aluminum film outside the contact portion is larger than that of the nitrogen-containing aluminum film within the contact portion. Thereby, a semiconductor device or a liquid crystal display device having a reduced contact resistance and an appropriate resistance against chemical liquid is achieved.