The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Feb. 14, 2001
Applicant:
Inventors:
Yoichi Domoto, Ikoma, JP;
Hiromasa Yagi, Nishinomiya, JP;
Assignee:
Sanyo Electric Co., Ltd., Moriguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/626 ;
U.S. Cl.
CPC ...
C23C 1/626 ;
Abstract
A method for treating a carbon film comprising, in sequence, depositing a carbon film onto a substrate by a plasma CVD technique and exposing the carbon film at its surface to a gas plasma produced utilizing at least one type of gas selected from an Ar gas, N gas, H gas and F-containing gas so that the carbon film surface is modified.