The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
May. 11, 2000
Applicant:
Inventors:
Gordon Robert Green, Bristol, GB;
Robert William Teagle, Bridgewater, GB;
Anthony William Barrass, Bristol, GB;
Assignee:
Trikon Holdings Limited, Newport, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/400 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/400 ; C23C 1/600 ;
Abstract
This invention relates to an apparatus for depositing a layer of material on to a workpiece. The apparatus includes chamber a sputter target a wafer support wafer transport aperture and a wafer transport mechanism The last delivers the wafers along a transport path An annular shield is disposed between the support and the target and lies in the wafer transport path Pins are provided to lift the annular shield out of the transport path