The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
May. 26, 2000
Ryuuichi Terajima, Kanagawa, JP;
Yukio Masuda, Kanagawa, JP;
Toshiharu Kurauchi, Ibaraki, JP;
Ken Momono, Chiba, JP;
Yoshio Sunaga, Kanagawa, JP;
Hidenori Suwa, Kanagawa, JP;
Kyuzo Nakamura, Kanagawa, JP;
Nihon Shinku Gijutsu Kabushiki Kaisha, Kanagawa, JP;
Abstract
A vacuum display device for enabling the manufacture of high quality plasma display device with high throughput. A front panel constituting a plasma display device is carried into a film deposition chamber ; and a MgO thin film is deposited in a vacuum atmosphere. The front panel is then carried into an alignment chamber without being exposed to the atmosphere and aligned with a rear panel that has been subjected to degassing in a vacuum atmosphere. There is no absorption of gas, such as moisture; and the quality of the thin film is not degraded. After alignment, aging processing is carried out without exposure to the atmosphere, followed by gas encapsulation and hermetic sealing, which further increases throughput.