The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Jun. 26, 2000
Hideharu Zenpo, Kitakyushu, JP;
Kabushiki Kaisha Yasakawa Denki, Kitakyushu, JP;
Abstract
A wafer transferring robot capable of restraining the vibration of wafers during the transfer. The robot comprises a rotating base ( ) rotatable on a base ( ), two horizontally extensible robot arms ( A, B) arranged laterally symmetrically to each other on the rotating base ( ) and comprising first arms ( A, B), second arms ( A, B), and third arms ( A, B), respectively, and chucks ( A, B), fixed to the third arms ( A, B), respectively; wherein the lower surface of the second arm ( B) of one robot arm ( B) is higher than the upper surface of the wafer (WA) held over the third arm ( A) of the other robot arm ( A) via the chuck. Accordingly, the rigidity of transferring parts can be so enhanced that the vibration of wafers (WA, WB) can be prevented.