The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Mar. 29, 2001
Alexander Todorov, Sunnyvale, CA (US);
Mila Genov, San Jose, CA (US);
Genmark Automation, Inc., Sunnyvale, CA (US);
Abstract
Access to the interior of a substrate storage pod in which substrates such as semiconductor wafers are stored is gained using an access device provided within a micro environment enclosure. The access device has a telescoping enclosure door which serves to control access to the interior of the storage pod from the interior of the enclosure. A pre-aligner is mounted to the enclosure door, and substrates are passed through the pre-aligner as they are retrieved from the storage pod. The pre-aligner detects and adjusts the orientation of the substrates as necessary for processing. The level of the pre-aligner is incrementally adjusted to match that of a current substrate by incrementally adjusting the level of the enclosure door.