The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 18, 2003

Filed:

Feb. 20, 2001
Applicant:
Inventors:

Masashi Otsuki, Musashimurayama, JP;

Shigeki Endo, Tokorozawa, JP;

Yuka Murakawa, Kita-ku, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 ;
U.S. Cl.
CPC ...
B08B 3/12 ;
Abstract

A long-lived cleaning vessel for ultrasonic cleaning is provided which is easily manufactured and is also easy to handle due to a simple structure thereof, and has excellent durability, mechanical strength, and corrosion resistance. A cleaning vessel of the present invention includes a layer of silicon carbide sintered body which propagates ultrasonic waves. Further, a silicon carbide sintered body is provided which can be applied to components for semiconductor production apparatuses, components for electronic information equipment, and various structural components for vacuum devices and the like, and which can particularly suitably be used as an ultrasonic resonance plate or an ultrasonic diaphragm, and can be easily processed, and further which can be made thinner while maintaining sufficient mechanical strength. The silicon carbide sintered body can propagate ultrasonic waves and an acoustic velocity of ultrasonic waves propagated therethrough is 4000 to 20000 m/s.


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